Dispersion engineering of high-Q silicon microresonators via thermal oxidation
نویسندگان
چکیده
منابع مشابه
Toward ultimate miniaturization of high Q silicon traveling-wave microresonators.
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2014
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.4890986